CRYSTALLOGRAPHIC PROPERTIES OF LA-MODIFIED AND MG-MODIFIED PBTIO3 THIN-FILMS PREPARED BY RF-MAGNETRON SPUTTERING METHOD

被引：4

作者：

KOBUNE, M ^{[1
]}

FUJII, S ^{[1
]}

AKAMATSU, K ^{[1
]}

TAKAYAMA, R ^{[1
]}

TOMOZAWA, A ^{[1
]}

机构：

[1] MATSUSHITA ELECT IND CO LTD, CENT RES LABS, KYOTO 61902, JAPAN

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 1995年 / 103卷 / 03期

关键词：

PYROELECTRIC INFRARED DETECTOR; ELEMENT MATERIAL; PBTIO3; THIN FILM; FIGURE OF MERIT; SPONTANEOUS POLARIZATION;

D O I：

10.2109/jcersj.103.298

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Highly c-axis-oriented lanthanum- and magnesium-modified PbTiO3 thin films with compositions of {(1-x) Pb0.9La0.1Ti0.975O3 + xMgO}, where x=0-0.025 (PLMT), were prepared on (100)-oriented Pt film electrodes/ (100)MgO single-crystal substrate by rf-magnetron sputtering method. The c-axis orientation, crystallinity, and structure of surface and cross section of films obtained were investigated in detail. From the viewpoint of the crystallographic properties, PLMT films with compositions of x=0.005-0.010 show great promise as new element thin-film materials.

引用

页码：298 / 301

页数：4

共 10 条

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