FUNDAMENTAL PROPERTIES AND WEAR-RESISTANCE OF RF-SPUTTERED TIB2 AND TI(B,N) COATINGS

被引：65

作者：

HERR, W

MATTHES, B

BROSZEIT, E

KLOOS, KH

机构：

[1] Institute of Material Science, Technical University of Darmstadt, W-6100 Darmstadt

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1991年 / 140卷

关键词：

D O I：

10.1016/0921-5093(91)90486-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin films of TiB2 and Ti(B,N) were deposited by means of r.f. sputtering. Fundamental properties such as structure, adhesion, hardness and internal stresses were determined as a function of the deposition parameters. By systematically changing the substrate voltage and in the case of Ti(B,N) the nitrogen flow, the film properties could be influenced over a wide range. The coatings have been tested with regard to their tribological behaviour by means of a model wear-testing apparatus. It is shown that Ti(B,N) is a promising coating for wear protection.

引用

页码：616 / 624

页数：9