AN ANALYSIS OF SURFACE-ACOUSTIC-WAVE DEVICES USING COUPLING-OF-MODE THEORY AND FINITE-ELEMENT METHOD

被引:12
作者
KOSHIBA, M
OHBUCHI, K
机构
[1] Department of Electronic Engineering, Hokkaido University, Sapporo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷
关键词
SAW; INTERDIGITAL TRANSDUCER; SAW GRATING REFLECTOR; COUPLING-OF-MODE THEORY; FINITE-ELEMENT METHOD;
D O I
10.7567/JJAPS.30S1.140
中图分类号
O59 [应用物理学];
学科分类号
摘要
A coupling-of-mode theory is described for the analysis of excitation characteristics of interdigital transducers (IDT) for surface acoustic waves (SAW) and of reflection characteristics of SAW gratings. Coupling and transduction coefficients of coupled mode equations can be theoretically determined by applying the finite-element method (FEM) to an infinite array corresponding to an electrically shorted or open IDT. The FEM is also used to calculate the static capacitance for one pair of IDTs. Examples are computed for various types of IDTs and metallic gratings on a 128-degrees Y-X LiNbO3 substrate.
引用
收藏
页码:140 / 142
页数:3
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