ION-BEAM TECHNIQUES FOR DEVICE FABRICATION

被引:39
作者
SPENCER, EG
SCHMIDT, PH
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 05期
关键词
D O I
10.1116/1.1316390
中图分类号
O59 [应用物理学];
学科分类号
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页码:S52 / &
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