THE EFFECT OF INHOMOGENEOUS DOPANT PROFILES ON THE ELECTRON-ENERGY LOSS SPECTRA OF SI(100)

被引:6
作者
FORSTER, A
LAYET, JM
LUTH, H
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 47卷 / 01期
关键词
D O I
10.1007/BF00619705
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:95 / 97
页数:3
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