FABRICATION OF 1ST-ORDER PERIODICALLY DOMAIN-INVERTED STRUCTURE IN LITAO3

被引：20

作者：

MIZUUCHI, K

YAMAMOTO, K

TANIUCHI, T

机构：

[1] Semiconductor Research Center, Matsushita Electric Industry Co., Ltd., Moriguchi, Osaka 570

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 13期

关键词：

D O I：

10.1063/1.106275

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on fabrication of first-order periodically domain-inverted structure in LiTaO3 by using selective proton exchange and heat treatment. Observation of the formation process of domain inversion makes it clear that the shape of the inverted region depends on time and temperature of heat treatment. As a result, enlargement of inversion width in heat treatment is suppressed by shortening the heat treatment time. First-order periodically domain-inverted structure, which has 3.5-mu-m period and 1.5-mu-m depth, is realized.

引用

页码：1538 / 1540

页数：3

共 10 条

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