AN ULTRA-HIGH-RESOLUTION SINGLE-DOMAIN MAGNETIC FORCE MICROSCOPE TIP FABRICATED USING NANOLITHOGRAPHY

被引:11
作者
CHOU, SY
WEI, MS
FISCHER, PB
机构
[1] Department of Electrical Engineering University of Minnesota, Minneapolis
关键词
D O I
10.1109/20.334126
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An ultra-high resolution MFM tip is proposed and demonstrated. The tip consists of a similar to 30 nm thick ferromagnetic film coated on a non-magnetic pillar that has a diameter of 150 nm, a length over 1.5 mu m and a sharp end of a 10 nm radius. file pillar was fabricated on the apex of a commercial scanning force microscope tip using electron beam lithography, The ferromagnetic films were coated only on one side of the pillar but not an the rest of the tip. Therefore, the tip ll;as a trough shape and a tapered end with a tip radius of similar to 10 nm. The ferromagnetic trough is single-domain because of its nanoscale size and shape anisotropy. Compared to conventional Ni wire tips, the new tips have a much smaller magnetic charge distribution at the end of the tip, thus offering better imaging resolution. Furthermore, they have a lower stray field, thus making them well suited to measuring soft magnetic materials.
引用
收藏
页码:4485 / 4487
页数:3
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