STUDY OF CU DIFFUSION IN BE USING ION BACKSCATTERING

被引：34

作者：

MYERS, SM ^{[1
]}

PICRAUX, ST ^{[1
]}

PREVENDER, TS ^{[1
]}

机构：

[1] SANDIA LABS, ALBUQUERQUE, NM 87115 USA

来源：

PHYSICAL REVIEW B | 1974年 / 9卷 / 10期

关键词：

D O I：

10.1103/PhysRevB.9.3953

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3953 / 3964

页数：12

共 36 条

[1] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :257-278

[2]

Boltaks B.I., 1963, DIFFUSION SEMICONDUC

[3] ION BACKSCATTERING ANALYSIS OF INTERDIFFUSION IN CU-AU THIN-FILMS [J].

BORDERS, JA .

THIN SOLID FILMS, 1973, 19 (02) :359-370

[4] STOPPING CROSS SECTIONS OF GASES FOR ALPHA PARTICLES FROM 0.3 TO 2 MEV [J].

BOURLAND, PD ;

CHU, WK ;

POWERS, D .

PHYSICAL REVIEW B-SOLID STATE, 1971, 3 (11) :3625-+

[5] BRAGG-RULE APPLICABILITY TO STOPPING CROSS SECTIONS OF GASES FOR ALPHA PARTICLES OF ENERGY 0.3-2.0 MEV [J].

BOURLAND, PD ;

POWERS, D .

PHYSICAL REVIEW B, 1971, 3 (11) :3635-&

[6]

Brice D. K., 1970, Radiation Effects, V6, P77, DOI 10.1080/00337577008235048

[7]

BRICE DK, PRIVATE COMMUNICATIO

[8] ALPHA-PARTICLE STOPPING CROSS SECTION IN SOLIDS FROM 400 KEV TO 2 MEV [J].

CHU, WK ;

POWERS, D .

PHYSICAL REVIEW, 1969, 187 (02) :478-&

[9] RADIATION ENHANCED DIFFUSION IN SOLIDS [J].

DIENES, GJ ;

DAMASK, AC .

JOURNAL OF APPLIED PHYSICS, 1958, 29 (12) :1713-1721

[10]

Dupouy J. M., 1966, MEM SCI REV MET, V63, P481

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