DETERMINATION OF CONCENTRATION-DEPENDENT DIFFUSION-COEFFICIENTS FROM THIN-FILM SUBSTRATE INTERDIFFUSION

被引：7

作者：

MEINEL, K

KLAUA, M

AMMER, C

机构：

[1] Akad der Wissenschaften der DDR, Germany

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 109卷 / 02期

关键词：

Films--Substrates;

D O I：

10.1002/pssa.2211090219

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple procedure is proposed for determining concentration-dependent diffusion coefficients from measurements of thin film/substrate interdiffusion performed by methods of surface analysis. The procedure is based on the Boltzmann-Matano method. It is applicable to all cases of single-phase diffusion.

引用

收藏

页码：525 / 529

页数：5

相关论文

共 12 条

[1] DIFFUSION KINETICS OF AU THROUGH PT FILMS ABOUT 2000 AND 6000A THICK STUDIED WITH AUGER-SPECTROSCOPY [J].

CHANG, CC ;

QUINTANA, G .

THIN SOLID FILMS, 1976, 31 (03) :265-273

[2]

CRANK J, 1967, MATH DIFFUSION

[3]

Czanderna A.W., 1975, METHODS SURFACE ANAL

[4] DIFFUSION OF SILVER THROUGH EPITAXIAL-FILMS OF COPPER AND NICKEL ON SILVER (111) - FORMATION OF AN EQUILIBRIUM LAYER OF SILVER [J].

GIBSON, MJ ;

DOBSON, PJ .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1975, 5 (10) :1828-&

[5] SOLUTION TO DIFFUSION EQUATION WITH CONTINUOUSLY VARYING COEFFICIENTS-SINGLE PHASE [J].

HOUSKA, CR ;

UNNAM, J .

SCRIPTA METALLURGICA, 1974, 8 (05) :509-512

[6] ITERATIVE APPROACHES DESCRIBING ATOMIC DIFFUSION IN FINITE SINGLE-PHASE AND 2-PHASE SYSTEMS [J].

HOUSKA, CR ;

UNNAM, J .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (10) :4325-4335

[7]

JOST W, 1972, DIFFUSION

[8] DIFFUSION OF AG IN AU THIN-FILMS STUDIED BY AUGER-SPECTROSCOPY [J].

MEINEL, K ;

KLAUA, M ;

BETHGE, H .

THIN SOLID FILMS, 1976, 34 (01) :157-160

[9] AES INVESTIGATIONS ON LOW-TEMPERATURE INTERDIFFUSION IN THIN AU FILMS ON AG (111) SUBSTRATES [J].

MEINEL, K ;

KLAUA, M ;

AMMER, C ;

BETHGE, H .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 106 (02) :493-507

[10]

MEINEL K, 1985, THESIS HALLE