A COMPUTER-MODEL FOR PULSED LASER-HEATING OF DEVICE STRUCTURES

被引：8

作者：

GODFREY, DJ ^{[1
]}

HILL, AC ^{[1
]}

HILL, C ^{[1
]}

机构：

[1] PLESSEY RES CASWELL LTD,ALLEN CLARK RES CTR,TOWCESTER,NORTHAMPTONSHIR,ENGLAND

来源：

关键词：

D O I：

10.1149/1.2127734

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1798 / 1803

页数：6

共 12 条

[1] MELTING MODEL FOR PULSING-LASER ANNEALING OF IMPLANTED SEMICONDUCTORS
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FOTI, G
RIMINI, E
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) : 788 - 797
[2] BELL AE, 1979, RCA REV, V40, P296
[3] HILL AD, UNPUBLISHED
[4] HILL C, 1978, AIP C P, V50, P419
[5] HILL C, 1980, J PHYS COLL S, P79
[6] HILL C, UNPUBLISHED
[7] MULTIDIMENSIONAL STEFAN PROBLEMS
MEYER, GH
[J]. SIAM JOURNAL ON NUMERICAL ANALYSIS, 1973, 10 (03) : 522 - 538
[8] OPTICAL HEATING IN SEMICONDUCTORS
MEYER, JR
BARTOLI, FJ
KRUER, MR
[J]. PHYSICAL REVIEW B, 1980, 21 (04): : 1559 - 1568
[9] Revesz A. G., 1973, Journal of Non-Crystalline Solids, V11, P309, DOI 10.1016/0022-3093(73)90020-3
[10] Smith G. D., 1978, NUMERICAL SOLUTION P