PULSED GAS INJECTION FOR ONLINE CALIBRATION OF RESIDUAL-GAS ANALYZERS

被引：11

作者：

KENDALL, BRF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.574129

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：143 / 148

页数：6

共 24 条

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