QUANTITATIVE AES ANALYSIS OF CO-EVAPORATED CU-NI FILMS AND EFFECTS OF ION SPUTTERING ON THEM - EXPERIMENTS AT LIQUID-NITROGEN AND ROOM-TEMPERATURE

被引：5

作者：

GOTA, K

KOSHIKAWA, T

ISHIKAWA, K

SHIMIZU, R

机构：

[1] OSAKA ELECTRO COMMUN UNIV,DEPT APPL ELECTR,NEYAGAWA,OSAKA 572,JAPAN

[2] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期

关键词：

D O I：

10.1116/1.569830

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1695 / 1700

页数：6

共 42 条

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