DEVELOPMENT OF A COMPACT SYNCHROTRON RADIATION SYSTEM FOR X-RAY-LITHOGRAPHY

被引：7

作者：

TAKADA, H ^{[1
]}

FURUKAWA, K ^{[1
]}

TOMIMASU, T ^{[1
]}

机构：

[1] MINIST INT TRADE & IND, AGCY IND SCI & TECHNOL, ELECTROTECH LAB, SAKURA, IBARAKI 305, JAPAN

来源：

关键词：

D O I：

10.1117/12.7976721

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：550 / 556

页数：7

共 16 条

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