HYDROGEN PASSIVATION AND THERMAL REACTIVATION OF ZINC DOUBLE ACCEPTORS IN SILICON

被引：22

作者：

STOLZ, P ^{[1
]}

PENSL, G ^{[1
]}

GRUNEBAUM, D ^{[1
]}

STOLWIJK, N ^{[1
]}

机构：

[1] UNIV MUNSTER,W-4400 MUNSTER,GERMANY

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 4卷 / 1-4期

关键词：

D O I：

10.1016/0921-5107(89)90211-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：31 / 34

页数：4

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