REVIEW AND OUTLINE OF ENVIRONMENTAL SEM AT PRESENT

被引：130

作者：

DANILATOS, GD

机构：

[1] ESEM Research Laboratory, Sydney, New South Wales, 2026, 98 Brighton Boulevard, North Bondi

来源：

JOURNAL OF MICROSCOPY | 1991年 / 162卷

关键词：

ENVIRONMENTAL SEM; ESEM; DETECTOR (GASEOUS); IONIZATION (GASEOUS); SCINTILLATION (GASEOUS); INSULATORS (SPECIMEN); WET SPECIMENS; LIVE SPECIMENS;

D O I：

10.1111/j.1365-2818.1991.tb03149.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

The environmental scanning electron microscope (ESEM) allows the examination of specimens in a gaseous environment. It is based on an integration of efficient differential pumping with a new design of electron optics and detection systems. Backscattered, cathodoluminescence and X-ray detectors can be designed to fit and to perform optimally in the ESEM. The secondary electron signal can be detected with the gaseous detector device, which is a new multipurpose detector. Insulating, uncoated, wet and generally both treated or untreated specimens can be studied.

引用

页码：391 / 402

页数：12

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