CAPILLARY ELECTROPHORESIS METHODS FOR THE TRACE CATION ANALYSIS OF SEMICONDUCTOR GRADES OF HYDROGEN-PEROXIDE

被引：13

作者：

CARPIO, RA ^{[1
]}

JANDIK, P ^{[1
]}

FALLON, E ^{[1
]}

机构：

[1] MILLIPORE CORP,DIV WATERS CHROMATOG,MILFORD,MA 01757

来源：

JOURNAL OF CHROMATOGRAPHY A | 1993年 / 657卷 / 01期

关键词：

D O I：

10.1016/0021-9673(93)83050-3

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

Method development and applications of capillary electrophoresis to the analysis of cations in highest purity grades of hydrogen peroxide which are used for semiconductor processing are discussed. Indirect UV detection in conjunction with electromigration sampling provides a sufficient sensitivity for measurements of low ppb (v/v) levers of contaminants. In contrast to hydrostatic sample introduction, the range of signal vs. concentration proportionality is limited with electromigration sampling. However, meaningful calibration plots can be obtained over the range of 1 to 35 ppb. Examples of electropherograms are presented for two different samples of semiconductor grade hydrogen peroxide. Also given are estimates of detection limits for cations found in analyzed samples.

引用

页码：185 / 191

页数：7

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