INVESTIGATION OF CONDUCTION IN ANODIC TANTALUM OXIDE-FILMS FORMED ON SPUTTERED TANTALUM

被引：14

作者：

JONES, MW ^{[1
]}

HUGHES, DM ^{[1
]}

机构：

[1] UNIV COLL N WALES,SCH ELECTR ENGN SCI,BANGOR,CAERNARVONSHIRE,WALES

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1974年 / 7卷 / 01期

关键词：

D O I：

10.1088/0022-3727/7/1/319

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：112 / 119

页数：8

共 16 条

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