MICROWAVE SURFACE-RESISTANCE OF REACTIVELY SPUTTERED NBN THIN-FILMS

被引:2
作者
BAUTISTA, JJ [1 ]
STRAYER, DM [1 ]
BERRY, MJ [1 ]
FARIS, SM [1 ]
机构
[1] HYPRES INC,ELMSFORD,NY 10523
关键词
D O I
10.1109/TMAG.1987.1064990
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:851 / 853
页数:3
相关论文
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