THIN-FILM GAS SENSORS

被引：3

作者：

EMMER, I

机构：

[1] Department of Electronics and Vacuum Physics, Charles University, Prague 8, 180 00

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1992年 / 73卷 / 05期

关键词：

D O I：

10.1080/00207219208925729

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A brief survey of the physical principles currently being used in gas sensing and detection is presented. In particular the concept of a chemical interface is introduced and the problems of the reactions of gases with chemical interfaces are discussed. Theoretical considerations are illustrated on experimental material which has been acquired mostly on impedance and piezoelectric sorption sensors.

引用

页码：875 / 879

页数：5

共 9 条

[1] PIEZOELECTRIC-CRYSTALS FOR MASS AND CHEMICAL MEASUREMENTS - A REVIEW [J].