A TUNABLE, ULTRAHIGH SPECTRAL BRIGHTNESS KRFSTAR EXCIMER LASER SOURCE

被引:56
作者
HAWKINS, RT [1 ]
EGGER, H [1 ]
BOKOR, J [1 ]
RHODES, CK [1 ]
机构
[1] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305
关键词
D O I
10.1063/1.91528
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:391 / 392
页数:2
相关论文
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