SOL-GEL FABRICATION OF EPITAXIAL AND ORIENTED TIO2 THIN-FILMS

被引:107
作者
SELVARAJ, U [1 ]
PRASADARAO, AV [1 ]
KOMARNENI, S [1 ]
ROY, R [1 ]
机构
[1] PENN STATE UNIV,DEPT AGRON,UNIV PK,PA 16802
关键词
TITANIA; SOL-GEL; THIN FILMS; EPITAXY; ORIENTATION;
D O I
10.1111/j.1151-2916.1992.tb05554.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin films of titania have been prepared by spin coating on fused silica, Si(100), and rutile(110), starting with a sol-gel process. The alkoxide solution was chelated with diisopropanolamine, and the resulting precursor solution was hydrolyzed prior to coating. Oriented rutile films were obtained on fused silica and Si(100), while epitaxially oriented film was formed on rutile(110). X-ray diffraction results indicated that the as-deposited films transformed to rutile via anatase with increasing temperature. The phase transformation temperature was found to be dependent on the substrate, and it was in general higher on the substrates than that observed for the gel powder. Microstructural studies revealed that these films consisted of finely dispersed grains of 0.05 to 0.15-mu-m in size.
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页码:1167 / 1170
页数:4
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