MECHANICAL-PROPERTIES OF COMPOSITIONALLY MODULATED AU-NI THIN-FILMS - NANOINDENTATION AND MICROCANTILEVER DEFLECTION EXPERIMENTS

被引:104
作者
BAKER, SP [1 ]
NIX, WD [1 ]
机构
[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305
基金
美国能源部;
关键词
D O I
10.1557/JMR.1994.3131
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The mechanical properties of compositionally modulated Au-Ni films were investigated by submicrometer depth-sensing indentation and by deflection of micrometer-scale cantilever beams. Films prepared by sputter deposition with composition wavelengths between 0.9 and 4.0 nm were investigated. Strength was found to be high and invariant with composition wavelength. Experimental and data analysis methods were developed to provide more accurate and precise measurements of elastic stiffness. Large enhancements in stiffness (the ''supermodulus effect'') were not observed. Rather, relatively small but significant minima were observed at a composition wavelength of about 1.6 nm by both techniques. These variations were found to be strongly correlated with variations in the average lattice parameter normal to the plane of the film. Both structural and mechanical property variations are consistent with a simple model in which the film consists of bulk-like Au and Ni layers with interfaces of constant thickness.
引用
收藏
页码:3131 / 3145
页数:15
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