SPUTTERING SYSTEM FOR THE PREPARATION OF COMPOSITIONALLY MODULATED FILMS

被引:2
作者
TOGAMI, Y
MORISHITA, T
TSUSHIMA, K
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 04期
关键词
D O I
10.1143/JJAP.26.635
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:635 / 636
页数:2
相关论文
共 8 条
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