AN EXPERIMENT IN LARGE AREA DIAMOND COATING USING A COMBUSTION FLAME TORCH IN ITS TRAVERSING MODE

被引:16
作者
MURAKAWA, M
TAKEUCHI, S
HIROSE, Y
机构
[1] Nippon Institute of Technology, Saitama-Prefecture, 345, 4-1 Gakuendai, Miyashiro-Machi
关键词
D O I
10.1016/0257-8972(90)90056-I
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Synthesis of diamond films by conventional chemical vapour deposition methods using a vacuum chamber is difficult when coating a large area substrate because of the limited space in the chamber. This paper deals with an experiment in which a large area substrate is diamond coated using a combustion method which does not have this problem. A tungsten substrate (50 mm x 50 mm x 5 mm) was used, over which an oxyacetylene combustion flame was passed at a speed of 2 mm min-1 to obtain a diamond coating. By establishing an optimum combination of coating parameters, including gas flow rate and substrate cooling rate, the substrate could be completely coated with a good diamond film over an area of approximately 40 mm x 40 mm.
引用
收藏
页码:22 / 29
页数:8
相关论文
共 3 条
[1]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[2]  
Hirose Y., 1988, 1ST INT C NEW DIAM S, P38
[3]   DIAMOND COATING OF A LONG SUBSTRATE BY USE OF A COMBUSTION FLAME [J].
MURAKAWA, M ;
TAKEUCHI, S ;
HIROSE, Y .
SURFACE & COATINGS TECHNOLOGY, 1989, 39 (1-3) :235-240