CONTROLLED OXIDATION OF TANTALUM AND ALUMINIUM IN A RADIO-FREQUENCY-EXCITED GLOW DISCHARGE

被引:12
作者
WORLEDGE, PL
WHITE, D
机构
来源
BRITISH JOURNAL OF APPLIED PHYSICS | 1967年 / 18卷 / 09期
关键词
D O I
10.1088/0508-3443/18/9/418
中图分类号
O59 [应用物理学];
学科分类号
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页码:1337 / &
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