OPTICAL TECHNIQUES FOR THE GENERATION OF MICROLENS ARRAYS

被引：97

作者：

HUTLEY, MC

机构：

[1] Division of Mechanical and Optical Metrology, National Physical Laboratory, Teddington

来源：

JOURNAL OF MODERN OPTICS | 1990年 / 37卷 / 02期

关键词：

D O I：

10.1080/09500349014550321

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A technique is described for the manufacture of regular closely packed arrays of very small lenses of good optical quality . Hexagonal fringes from three-beam interference are first recorded in photoresist to produce a hexagonal array of quasi-cylindrical lenses . These are then used to image a point source of light into an array of narrow lines, which are recorded in photoresist and developed through to the substrate . The photoresist is then melted to produce lenses. © 1990 Taylor & Francis Ltd.

引用

页码：253 / 265

页数：13

共 7 条

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[2]

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[3] 3-DIMENSIONAL IMAGING-SYSTEMS - A NEW DEVELOPMENT [J].

DAVIES, N ;

MCCORMICK, M ;

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[4]

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[5]

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[6]

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[7] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

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