PARTIALLY IONIZED BEAM DEPOSITION OF ORIENTED FILMS

被引：19

作者：

YAPSIR, AS

YOU, L

LU, TM

MADDEN, M

机构：

[1] RENSSELAER POLYTECH INST,DEPT PHYS,TROY,NY 12181

[2] INTEL CORP,SANTA CLARA,CA 95051

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 02期

关键词：

30;

D O I：

10.1557/JMR.1989.0343

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：343 / 349

页数：7

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