MICROFABRICATED HINGES

被引：243

作者：

PISTER, KSJ ^{[1
]}

JUDY, MW ^{[1
]}

BURGETT, SR ^{[1
]}

FEARING, RS ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,BERKELEY SENSOR & ACTUATOR CTR,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 33卷 / 03期

关键词：

SURFACE MICROMACHINING; MICROMECHANICS; MICROHINGES; 3-DIMENSIONAL STRUCTURES; POLYSILICON;

D O I：

10.1016/0924-4247(92)80172-Y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new surface micromachining process has been developed for the fabrication of a wide variety of three-dimensional structures. Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication, and interconnected with other structures to form complex three-dimensional designs with detailed features in all three dimensions. Electrical contact to the assembled structures has been demonstrated. Several structures are presented here: a hot-wire anemometer, a tissue growth dynamometer, and a gripper.

引用

页码：249 / 256

页数：8

共 13 条

[1]

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[2]

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[3]

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[4]

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[5]

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[6]

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[7]

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[10]

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