DEVELOPMENT OF A COBALT LIQUID ALLOY ION-SOURCE

被引：26

作者：

HESSE, E

BISCHOFF, L

TEICHERT, J

机构：

[1] Research Center Rossendorl Inc., Dresden, D-01314

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1994年 / 27卷 / 02期

关键词：

D O I：

10.1088/0022-3727/27/2/038

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A cobalt-neodymium liquid alloy ion source for applications in focused ion beam devices was developed and investigated. The performance and the main parameters of the ion source are presented.

引用

页码：427 / 428

页数：2

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