ENERGETICS AND MECHANISMS IN THE REACTION OF SI+ WITH SICL4 - THERMOCHEMISTRY OF SICL, SICL+, AND SICL2+

被引：38

作者：

WEBER, ME

ARMENTROUT, PB

机构：

[1] UNIV UTAH,DEPT CHEM,SALT LAKE CITY,UT 84112

[2] UNIV CALIF BERKELEY,DEPT CHEM,BERKELEY,CA 94720

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1989年 / 93卷 / 04期

关键词：

D O I：

10.1021/j100341a082

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：1596 / 1604

页数：9

相关论文

共 58 条

[1] ANDIANOV KA, 1970, DOKL AKAD NAUK SSSR+, V194, P1077
[2] METHANE ACTIVATION BY V+ - ELECTRONIC AND TRANSLATIONAL ENERGY-DEPENDENCE
ARISTOV, N
ARMENTROUT, PB
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1987, 91 (24) : 6178 - 6188
[3] REACTION-MECHANISMS AND THERMOCHEMISTRY OF V++C2H2P (P = 1-3)
ARISTOV, N
ARMENTROUT, PB
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1986, 108 (08) : 1806 - 1819
[4] CHEMICAL PROCESSES IN VAPOR-DEPOSITION OF SILICON .2. DEPOSITION FROM SICL3H AND SICL4
BAN, VS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) : 1389 - 1391
[5] BASSETT PJ, 1971, J CHEM SOC A, P644
[6] BATSONOV SS, 1961, REFRACTOMETRY CHEM S
[7] RATE-DETERMINING REACTIONS AND SURFACE SPECIES IN CVD SILICON .4. THE SICL4-H2-N2 AND THE SIHCL3-H2-N2 SYSTEM
BLOEM, J
CLAASSEN, WAP
VALKENBURG, WGJN
[J]. JOURNAL OF CRYSTAL GROWTH, 1982, 57 (01) : 177 - 184
[8] REACTION OF SILICON ION (2P) WITH SILANE (SIH4, SID4) - HEATS OF FORMATION OF SIH1, SIH2, SIH3, SIH1+, SIH2+, SIH3+, AND SI2H0+, SI2H1+, SI2H2+, SI2H3+ - REMARKABLE ISOTOPE EXCHANGE-REACTION INVOLVING 4 HYDROGEN SHIFTS
BOO, BH
ARMENTROUT, PB
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1987, 109 (12) : 3549 - 3559
[9] RYDBERG STATES OF SIBR
BOSSER, G
BREDOHL, H
DUBOIS, I
[J]. JOURNAL OF MOLECULAR SPECTROSCOPY, 1984, 106 (01) : 72 - 76
[10] Box G.E.P., 1978, STATISTICS EXPT, P319

← 1 2 3 4 5 6 →