P-TYPE DOPING OF DIAMOND FILMS WITH A NOVEL ORGANOBORON SOURCE

被引：13

作者：

ZHANG, XK ^{[1
]}

GUO, JG ^{[1
]}

YAO, YF ^{[1
]}

WANG, R ^{[1
]}

CHEN, GM ^{[1
]}

ZHOU, WK ^{[1
]}

YU, S ^{[1
]}

机构：

[1] CHINESE ACAD SCI,SHANGHAI INST ORGAN CHEM,SHANGHAI 200032,PEOPLES R CHINA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1993年 / 56卷 / 05期

关键词：

D O I：

10.1007/BF00332575

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

p-Type polycrystalline diamond films were prepared by hot-filament CVD method using a liquid cyclic organic borinate ester as the doping source. The obtained films were identified as diamond films by means of SEM and Raman spectroscopy. The resistivity of the doped films can be adjusted by changing the temperature of the boron source.

引用

页码：425 / 428

页数：4

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