FABRICATION OF NANOMETER FLAT AREAS ONTO YBA2CU3O7-X THIN-FILM SURFACES BY SCANNING TUNNELING MICROSCOPE

被引：12

作者：

VIRTANEN, JA ^{[1
]}

SUKETU, P ^{[1
]}

HUTH, GC ^{[1
]}

CHO, ZH ^{[1
]}

机构：

[1] UNIV CALIF IRVINE,DEPT RADIOL SCI,IRVINE,CA 92717

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 06期

关键词：

D O I：

10.1063/1.349278

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A scanning tunneling microscope was used to mechanically "mill" nanometer flat areas of up to 1600-mu-m2 on high temperature superconducting (HTS) films of YBa2Cu3O7-x which were originally formed by laser ablation. Flatness to a standard deviation of 2 nm in height was found to be characteristic of milled areas. It was subsequently possible to mill trenches and ditches onto these flat areas. Scanning tunneling measurements of the exposed layered structure of the milled HTS surface are also reported. Surface modifications are also possible by the application of voltage pulse to the tunneling tip. The combination of electrical pulses and milling offer a possibility of mixed electromechanical patterning of the film.

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页码：3376 / 3378

页数：3

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