X-RAY-FLUORESCENCE METHOD FOR COATING THICKNESS MEASUREMENT

被引：11

作者：

JAIN, SK

GUPTA, PP

EAPEN, AC

机构：

[1] Isotope Divn, Bhabha Atomic Research Centre, Bombay, Trombay

来源：

X-RAY SPECTROMETRY | 1979年 / 8卷 / 01期

关键词：

D O I：

10.1002/xrs.1300080106

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

An X‐ray fluorescence method for the measurement of film and coating thickness has been described for use in situations where standard foils of the same material are not available for comparison. The method is based on the measurement of combined mass absorption coefficient of the coating element at the excitation and at the fluorescent energies using thin samples of a compound in which the coating element is present and then calculating the coating thickness using the fluorescence equation. The paper describes the theoretical approach and presents the result of the measurement of certain film and coating thicknesses which support the theoretical considerations. Copyright © 1979 Heyden & Son Ltd.

引用

页码：11 / 13

页数：3