SILICIDE FORMATION IN PD-A-SI-H SCHOTTKY BARRIERS

被引:45
作者
THOMPSON, MJ
JOHNSON, NM
NEMANICH, RJ
TSAI, CC
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D O I
10.1063/1.92670
中图分类号
O59 [应用物理学];
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页码:274 / 276
页数:3
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