MICROMACHINED GYROSCOPES

被引：152

作者：

SODERKVIST, J

机构：

[1] Colibri Pro Development AB, S-183 72 Täby

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(93)00667-S

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An overview of applications well suited for micromachined angular rate sensors, together with estimates of required performance, are given. Vibrating angular rate sensors are discussed in general, and examples of sensor concepts are given. The requirements are compared with the performance of a micromachined quartz angular rate sensor, with a sensor element similar to a quartz tuning fork watch crystal. Measured values after power-up include resolution and drift of the zero rate output of less than 0.1-degrees/s and 0.5-degrees/s/h, respectively. This suffices for many applications. The presented quartz sensor has the potential of becoming the smallest and cheapest gyroscope for its performance class.

引用

页码：65 / 71

页数：7

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