HIGH-TC SUPERCONDUCTING BI-SR-CA-CU-O THIN-FILMS PREPARED BY LASER-INDUCED PLASMA DEPOSITION

High-Tc superconducting thin films of Bi-Sr-Ca-Cu oxides were prepared by laser-induced plasma deposition of high-Tc superconducting Bi2Sr2Ca1Cu2Ox and Bi2Sr2Ca2Cu3Ox targets in vacuum and a short post-annealing in air at 875°C. Thin films (thickness <500 nm) with a critical temperature Tc-onset of 95 K can be prepared on silicon substrate material with a SrTiO3 interface layer. The thin films were completely superconducting between 80 and 90 K. The stoichiometry transfer of superconducting target material by laser-induced plasma deposition was investigated. © 1990 Springer-Verlag.