THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN A SHIELDED ARGON RADIOFREQUENCY INDUCTIVE DISCHARGE

The electron-energy distribution function (EEDF) and its integrals such as plasma density and effective electron temperature have been measured in an inductively coupled plasma. The EEDFs were measured together with electrical discharge characteristics over a wide range of argon gas pressure between 1 mTorr and 1 Torr. The discharge was maintained by an internal induction coil, which was electrostatically shielded to provide a purely inductive discharge. All measurements were related to RF power dissipated in the plasma. Non-Maxwellian EEDFS were found that differ significantly from those found in capacitive RF discharges and in inductive discharges without or with only partial electrostatic shielding.