ELECTRON-BEAM TESTING OF MONOLITHIC INTEGRATED MICROMETERWAVE AND MILLIMETER-WAVE CIRCUITS

被引：3

作者：

FEHR, J

SINNWELL, H

BALK, LJ

KUBALEK, E

机构：

[1] Universität Duisburg Fachgebiet Werkstoffe der Elektrotechnik Sonderforschungsbereich 254, W4100 Duisburg

来源：

MICROELECTRONIC ENGINEERING | 1992年 / 16卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(92)90336-P

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An electron beam testing system has been developed, consisting of a new type of electron beam blanking system and a specimen holder designed for applying GHz-frequencies to the device under test. First quantitative measurements have been done on a special test structure, showing the influence of the transit-time-effect on quantitative measurements. These experimental results were compared with results obtained by simulations, showing good agreement. Although the electron beam testing system, works in a frequency range from 8 to 18 GHz the results show that quantitative measurements are only practical for frequencies below 2.5 GHz, assuming a maximum measurement error of 10%.

引用

页码：165 / 171

页数：7

共 10 条

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