CARBON DIMER, C-2 AS A GROWTH SPECIES FOR DIAMOND FILMS FROM METHANE/HYDROGEN/ARGON MICROWAVE PLASMAS

被引：104

作者：

GRUEN, DM ^{[1
]}

ZUIKER, CD ^{[1
]}

KRAUSS, AR ^{[1
]}

PAN, XZ ^{[1
]}

机构：

[1] ARGONNE NATL LAB,DIV CHEM,ARGONNE,IL 60439

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1995年 / 13卷 / 03期

关键词：

D O I：

10.1116/1.579742

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1628 / 1632

页数：5

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