NEGATIVE-ION PLASMA SOURCES

被引：61

作者：

SHEEHAN, DP

RYNN, N

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1988年 / 59卷 / 08期

关键词：

D O I：

10.1063/1.1139671

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1369 / 1375

页数：7

共 31 条

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