CHEMI-LUMINESCENCE AND THE REACTION OF MOLECULAR FLUORINE WITH SILICON

被引：71

作者：

MUCHA, JA

DONNELLY, VM

FLAMM, DL

WEBB, LM

机构：

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1981年 / 85卷 / 23期

关键词：

D O I：

10.1021/j150623a032

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：3529 / 3532

页数：4

共 15 条

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[3] INFRARED CHEMI-LUMINESCENCE FROM XEF2-SILICON-SURFACE REACTIONS [J].

CHUANG, TJ .

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[4]

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[5] ROBUST LOCALLY WEIGHTED REGRESSION AND SMOOTHING SCATTERPLOTS [J].

CLEVELAND, WS .

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[6]

DONNELLY VM, 1980, J APPL PHYS, V51, P5274

[7]

DONNELLY VM, 1980, 88TH P NAT M AM I CH

[8]

DONNELLY VM, 1980, 157TH M EL SOC ST LO, V80, P323

[9] THE REACTION OF FLUORINE-ATOMS WITH SILICON [J].

FLAMM, DL ;

DONNELLY, VM ;

MUCHA, JA .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) :3633-3639

[10]

FLAMM DL, 1979, J APPL PHYS, V50, P624

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