CHEMICAL VAPOR-DEPOSITION OF SUPERCONDUCTING BI-SR-CA-CU-O FILMS USING FLUOROCARBON-BASED PRECURSORS

被引:25
作者
NEMOTO, M
YAMANAKA, M
机构
[1] Scientific Research Laboratory, Central Engineering Laboratories, Nissan Motor Co., Ltd., Yokosuka, Kanagawa 237, 1, Natsushima-cho
关键词
D O I
10.1557/JMR.1990.0001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Superconducting Bi-Sr-Ca-Cu-O thin films have been prepared for the first time by chemical vapor deposition using triphenyl bismuth and fluorocarbon-based chelates such as bis(hexafluoroacetylacetonate)strontium, bis(hexafluoroacetylacetonate)calcium, and bis(hexafluoroacetylacetonate)copper. After annealing in air, x-ray diffraction data reveal that the films deposited on (001) SrTiO3 substrates have preferential orientation of their crystalline c-axis perpendicular to the substrate surface. Four-probe resistivity measurements reveal the onset of superconductivity at 80 K and zero resistivity at 50 K. © 1990, Materials Research Society. All rights reserved.
引用
收藏
页码:1 / 4
页数:4
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