SILICON ON INSULATOR OPTICAL WAVE-GUIDES FORMED BY DIRECT WAFER BONDING

被引：10

作者：

REED, GT ^{[1
]}

LI, JH ^{[1
]}

TANG, CK ^{[1
]}

LIN, CL ^{[1
]}

HEMMENT, PLF ^{[1
]}

RICKMAN, AG ^{[1
]}

机构：

[1] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1992年 / 15卷 / 02期

关键词：

D O I：

10.1016/0921-5107(92)90048-E

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Planar optical waveguides were fabricated by the novel technique of direct wafer bonding. The propagation loss was determined for both TE and TM polarizations, at wavelengths of 1.15 mum and 1.523 mum. The lowest loss of 0.27 dB cm-1 was measured for a waveguide with a guiding layer of 7.1 mum using a TE polarized input beam at a wavelength of 1.523 mum.

引用

页码：156 / 159

页数：4

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