PHYSICAL FUNDAMENTALS OF LASER FORMING OF MICRO-OPTICAL COMPONENTS

The possibility of micro-optical component (MOC) fabrication by laser action onto optical glasses and glass-like material (GLM) is based on the local heating-cooling cycle. The results of such action are certain to be defined by physical processes that accompany local heating and fast cooling of glass and GLM. It is possible to classify these laser action processes on the optical materials in three main groups in terms of temperature, heating and cooling rates, and the size of residual stresses. The presented facts suggest that during laser heating, the processes of changing the structure and properties of glasses and GLM differ by speed and temperature from processes that occur at heating in a furnace.