OPTICAL AND ELECTRICAL-PROPERTIES OF ION-BEAM-TEXTURED KAPTON AND TEFLON

被引:6
作者
MIRTICH, MJ
SOVEY, JS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词
KAPTON; -; TEFLON;
D O I
10.1116/1.569674
中图分类号
O59 [应用物理学];
学科分类号
摘要
An electron bombardment argon ion source was used to ion etch polyimide (Kapton) and fluorinated ethylene propylene, FEP (Teflon). Samples of polyimide and FEP were exposed to 0. 5-1. 0-keV Ar ions at ion current densities of 1. 0-1. 8 mA/cm**2 for various exposure times. Changes in the optical and electrical properties of the samples were used to characterize the exposure. Spectral reflectance and transmitance measurements were made between 0. 33 and 2. 6 mu m using an integrating sphere after each exposure. From these measurements, values of solar absorptance were obtained. Total emittance measurements were also recorded for some samples. Surface resitivity was used to determine changes in the electrical conductivity of the etched samples. A scanning electron microscope was used to record surface structure after exposure. Presented in the paper are spectral optical data, resistivity measurements, calculated absorptance and emittance measurements, along with photomicrographs of the surface for the various exposures to Ar ions.
引用
收藏
页码:697 / 701
页数:5
相关论文
共 10 条
[1]  
BAUMAN RL, 1969, TMX52687 NASA
[2]  
HALL DF, 1972, AIAA72446 PAP
[3]  
HUDSON W, 1976, TMX73470 NASA
[4]  
Kaufman H.R., 1974, ADV ELECT ELECT PHYS, V36, P265
[5]  
MIRTICH MJ, 1971, SPACECR ROCK, V8, P1164
[6]  
MIRTICH MJ, 1966, D3187 NASA TN
[7]  
SOVEY JS, 1976, AIAA761017 PAP
[8]  
STEVENS NJ, 1976, PROG ASTRONAUT AERON, V47, P3
[9]  
WEISSMANTEL C, 1974, J APPL PHYS S, V2, P439
[10]  
WRIGHT J, 1976, AIAA76808 PAP