ELECTRON-BEAM IRRADIATION EFFECTS FOR HIGH-TC SUPERCONDUCTING THIN-FILMS

Electron beam (EB) irradiation effects for Y and Bi system thin films are investigated. It is observed through Auger electron spectroscopy (AES) study that as EB exposure increases oxygen Auger intensity for both films decreases due to EB desorption, while at the same time Cu for Y system and Bi for Bi system Auger intensities increase. Moreover, in transmission electron microscopy (TEM) studies, a BiO(x) like crystal structure is observed on the Bi system surface after EB irradiation. By measuring electron dose dependencies of resistivity versus temperature, it became clear that the crystal structure of a Bi system thin film is destroyed with a lower electron dose, than for Y system thin films. A 0.1-mu-m thick Bi film irradiated at 0.54 C/cm2 dose indicates nonsuperconducting characteristics.