MASS-SPECTROMETRIC INVESTIGATION OF THE KRF LASER-INDUCED PLASMA PLUME CREATED ABOVE AN YBACUO SUPERCONDUCTING TARGET - CORRELATION WITH THICKNESS DISTRIBUTION OF DEPOSITED THIN-FILMS

被引：15

作者：

CHAMPEAUX, C ^{[1
]}

DAMIANI, D ^{[1
]}

AUBRETON, J ^{[1
]}

CATHERINOT, A ^{[1
]}

机构：

[1] IND LASER PARTNERS,F-87130 ST LAURENT GORRE,FRANCE

来源：

APPLIED SURFACE SCIENCE | 1993年 / 69卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(93)90499-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The plasma plume created during the ablation of YBaCuO superconducting targets by a KrF laser beam (248 nm) is studied by mass spectrometry so as to understand one of the key-points of this thin films elaboration technique, that is to say the transport of yttrium, barium, copper and oxygen species to the substrate. The evolutions of the relative concentrations of the detected species are reported as functions of the laser fluence on the target surface. The angular distribution of ejected species is measured and fitted by cos(n) curves. The results, correlated with thickness, allow an estimation of the relative contributions of neutral and ionic species in deposited thin films.

引用

页码：169 / 173

页数：5

共 5 条

[1] LASER IONIZATION MASS-SPECTROMETRY OF YBA2CU3O7-X SUPERCONDUCTORS [J].