AN AUTOMATIC SMOOTHING ALGORITHM FOR THE CALCULATION OF IMPURITY CONCENTRATION FROM SHEET RESISTIVITY AND SHEET HALL-COEFFICIENT DATA

被引:4
作者
HILL, AC
ALLEN, WG
BRADLEY, R
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D O I
10.1016/0038-1101(80)90087-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:491 / 496
页数:6
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