MICROWAVE PLASMA CVD OF OXIDE-FILMS RELATING TO HIGH-TC BI-SR-CA-CU-O SUPERCONDUCTOR

被引:5
作者
HASHIMOTO, T
KOSAKA, T
YOSHIDA, Y
KOINUMA, H
机构
来源
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 1990年 / 184卷
关键词
D O I
10.1080/00268949008031763
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:207 / 211
页数:5
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