GETTERING OF COPPER IN PROTON-BOMBARDED AND HELIUM-BOMBARDED BURIED REGIONS OF GALLIUM-PHOSPHIDE

被引：4

作者：

ASCHERON, C ^{[1
]}

KLOSE, HA ^{[1
]}

FRENTRUP, W ^{[1
]}

GRIEPENTROG, M ^{[1
]}

机构：

[1] HUMBOLDT UNIV,SEKT PHYS,DDR-1040 BERLIN,GER DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1988年 / 106卷 / 01期

关键词：

D O I：

10.1002/pssa.2211060110

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：73 / 79

页数：7

共 17 条

[1]

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[7]

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[8]

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[9] RUTHERFORD SCATTERING STUDY OF DIFFUSION OF HEAVY-METAL IMPURITIES IN SILICON TO ION-DAMAGED SURFACE-LAYERS [J].

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[10] POSITRON STUDY OF VACANCY DEFECTS IN PROTON AND NEUTRON-IRRADIATED GAP, INP, AND SI [J].

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